| InP Wafer Specifications |
To print the leaflet ......
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| Size | 2" | 3" | 4" | ||
| Diameter(mm) | 50.5±0.5 | 76.2±0.5 | 100.0±0.5 | ||
| Thickness(um) | 350±25 | 600±25 | 600±25 | ||
| Orientation | (100)/(111) ±0.5° | ||||
| Major Flat Length(mm) | 16±2 | 22±2 | 32.5±2 | ||
| Minor Flat Length(mm) | 8±1 | 11±1 | 18±1 | ||
| TTV(um) | <10 | <10 | <15 | ||
| Bow(um) | <10 | <10 | <15 | ||
| Warp(um) | <15 | <15 | <15 | ||
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| Size | 2" | 3" | 4" | ||
| Diameter(mm) | 50.5±0.5 | 76.2±0.5 | 100.0±0.5 | ||
| Thickness(um) | 500±25 | 600±25 | 800±25 | ||
| Orientation | (100)/(111) ±0.5º | ||||
| Major Flat Length(mm) | 16±2 | 22±2 | 32.5±2 | ||
| Minor Flat length(mm) | 8±1 | 11±1 | 18±1 | ||
| TTV(um) | ＜10 | ＜10 | ＜15 | ||
| Bow(um) | ＜10 | ＜10 | ＜15 | ||
| Warp(um) | ＜15 | ＜15 | ＜15 | ||
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| Size | 2" | 3" | |||
| Diameter(mm) | 50.5±0.5 | 76.2±0.5 | |||
| Thickness(um) | 500±25 | 600±25 | |||
| Orientation | (100)/(111) ±0.5º | ||||
| Major Flat Length(mm) | 16±2 | 22±2 | |||
| Minor Flat Length(mm) | 8±1 | 11±1 | |||
| TTV(um) | <10 | <10 | |||
| Bow(um) | <10 | <10 | |||
| Warp(um) | <15 | <15 | |||